Title :
RCE photodetectors based on VCSEL structures
Author :
Knodl, T. ; Choy, H.K.H. ; Pan, J.L. ; King, R. ; Jager, R. ; Lullo, G. ; Ahadian, J.F. ; Ram, R.J. ; Fonstad, C.G., Jr. ; Ebeling, K.J.
Author_Institution :
Dept. of Optoelectron., Ulm Univ., Germany
Abstract :
We have fabricated top illuminated resonant cavity enhanced (RCE) detectors by partially removing top-mirror pairs of a vertical-cavity surface-emitting laser (VCSEL) structure by etching. The observed maximum quantum efficiency is 73% with a spectral full-width at half-maximum (FWHM) of about 1.7 nm. This particular RCE detector was fabricated by etching away 8 top-mirror pairs of a VCSEL structure, with 15.5 top-mirror pairs remaining. Spectral FWHMs as wide as 6.5 nm, with a peak efficiency of 36%, have been measured in the case of 4.5 top mirrors remaining. An increase in the 3-dB detector bandwidth up to 2.8 GHz is observed by reducing the active device diameter from 90 to 20 μm.
Keywords :
laser cavity resonators; molecular beam epitaxial growth; optical fabrication; optical resonators; photodetectors; semiconductor growth; surface emitting lasers; 2.8 GHz; 36 percent; 73 percent; 90 to 20 mum; RCE detector; RCE photodetectors; VCSEL structure; VCSEL structures; active device diameter; etching; observed maximum quantum efficiency; peak efficiency; spectral full-width at half-maximum; top illuminated resonant cavity enhanced detectors; top-mirror pairs; vertical-cavity surface-emitting laser; Bandwidth; Detectors; Etching; Fabrication; Mirrors; Molecular beam epitaxial growth; Optical sensors; Photodetectors; Resonance; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
