DocumentCode
1552771
Title
Chemical processing of dielectrics, insulators and electronic ceramics, vol. 606 [Book Reviews]
Author
Shea, John
Volume
17
Issue
6
fYear
2001
Firstpage
64
Lastpage
64
Keywords
Book reviews; Ceramics; Chemical processes; Chemical vapor deposition; Dielectric materials; Dielectric thin films; Dielectrics and electrical insulation; High K dielectric materials; Photovoltaic cells; Sputtering;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2001.969951
Filename
969951
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