Title :
Chemical processing of dielectrics, insulators and electronic ceramics, vol. 606 [Book Reviews]
Keywords :
Book reviews; Ceramics; Chemical processes; Chemical vapor deposition; Dielectric materials; Dielectric thin films; Dielectrics and electrical insulation; High K dielectric materials; Photovoltaic cells; Sputtering;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2001.969951
