DocumentCode
1552775
Title
New methods, mechanisms and models of vapor deposition, vol. 616 [Book Reviews]
Author
Shea, John
Volume
17
Issue
6
fYear
2001
Firstpage
64
Lastpage
64
Keywords
Atomic layer deposition; Book reviews; Chemical vapor deposition; Coatings; High temperature superconductors; Polymers; Springs; Sputtering; Superconducting thin films; Thermal degradation;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2001.969952
Filename
969952
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