Title :
Microelectromechanical capacitor with wide tuning range
Author :
Nieminen, H. ; Ermolov, V. ; Ryhnen, T.
Author_Institution :
Nokia Res. Center, Helsinki, Finland
fDate :
11/22/2001 12:00:00 AM
Abstract :
A new anchoring design is proposed for a microelectromechanical (MEM) capacitor that allows realisation of wide tuning range devices. The MEM capacitor is made of gold using surface micromachining. The capacitor has a capacitance of 1.58 pF and achieves a tuning range of 2.25:1 with parasitics
Keywords :
Q-factor; capacitors; gold; micromechanical devices; tuning; 1.58 pF; Au; MEMS capacitor; anchoring design; gold; high quality factor; high-Q factor; low series resistance; microelectromechanical capacitor; surface micromachining; variable capacitors; voltage controlled capacitor; wide tuning range devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20011005
