Application of on-wafer TRL calibration on the measurement of microwave properties of Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/ films

Author

Lue, Hang-Ting ; Tseng, Tseung-Yuen

Author_Institution

Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

Volume

48

Issue

6

fYear

2001

Firstpage

1640

Lastpage

1647

Abstract

A series of Al/Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/ (BST) /sapphire multi-layered coplanar waveguide (CPW) transmission lines of different geometries and thin-film configurations was fabricated. We employed an accurate on-wafer Through-Line-Reflect (TRL) calibration technique and quasi-TEM analysis to measure the dielectric constant, loss tangent, and tunability of BST thin films using this CPW structure. Experimental results show that the overall insertion loss is less than 3 dB/cm even at frequencies as high as 20 GHz, which is the lowest obtained to date for metal/BST CPW devices. This result indicates that, with optimized impedance matching, normal conductors are also possibly suitable for fabricating low-loss tunable phase-shifter devices.

Keywords

aluminium; barium compounds; calibration; coplanar waveguides; dielectric loss measurement; ferroelectric thin films; microwave materials; microwave measurement; microwave phase shifters; permittivity measurement; sapphire; strontium compounds; tuning; 20 GHz; Al-Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/-Al/sub 2/O/sub 3/; Al/Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3//sapphire multilayer structure; BST thin films; BST/sapphire multi-layered CPW transmission lines; coplanar waveguide transmission lines; dielectric constant; geometries; insertion loss; loss tangent; low-loss phase-shifter devices; microwave properties measurement; on-wafer TRL calibration; on-wafer TRL calibration technique; optimized impedance matching; quasi-TEM analysis; thin-film configurations; through-line reflect calibration; tunability; tunable phase-shifter devices; Binary search trees; Calibration; Coplanar transmission lines; Coplanar waveguides; Dielectric loss measurement; Dielectric measurements; Dielectric thin films; Geometry; Strontium; Transmission line measurements;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.971716

Filename

971716