Title :
CAD tools for bridging microsystems and foundries
Author :
Karam, Jean Michel ; Courtois, Bernard ; Boutamine, Hicham
Author_Institution :
TIMA Lab., SGS-Thomson Microelectron., Grenoble, France
Abstract :
To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices
Keywords :
CMOS integrated circuits; circuit CAD; integrated circuit design; micromachining; micromechanical devices; CAD tools; cofabrication; hybrid approach; microelectromechanical CAD environment; micromachined devices; microsystems; monolithic approach; Anisotropic magnetoresistance; CMOS technology; Design automation; Etching; Fabrication; Foundries; Infrared sensors; Micromachining; Micromechanical devices; Silicon;
Journal_Title :
Design & Test of Computers, IEEE
