• DocumentCode
    1554753
  • Title

    CAD tools for bridging microsystems and foundries

  • Author

    Karam, Jean Michel ; Courtois, Bernard ; Boutamine, Hicham

  • Author_Institution
    TIMA Lab., SGS-Thomson Microelectron., Grenoble, France
  • Volume
    14
  • Issue
    2
  • fYear
    1997
  • Firstpage
    34
  • Lastpage
    39
  • Abstract
    To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices
  • Keywords
    CMOS integrated circuits; circuit CAD; integrated circuit design; micromachining; micromechanical devices; CAD tools; cofabrication; hybrid approach; microelectromechanical CAD environment; micromachined devices; microsystems; monolithic approach; Anisotropic magnetoresistance; CMOS technology; Design automation; Etching; Fabrication; Foundries; Infrared sensors; Micromachining; Micromechanical devices; Silicon;
  • fLanguage
    English
  • Journal_Title
    Design & Test of Computers, IEEE
  • Publisher
    ieee
  • ISSN
    0740-7475
  • Type

    jour

  • DOI
    10.1109/54.587739
  • Filename
    587739
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1554753