Micromachined 1×n fiber-optic switch

A new microfabrication technology based on bulk anisotropic etching is presented that offers significant improvements over present microoptical and microphotonic devices. With this new technology we have fabricated 200 μm to 2 cm translational stages, fiber-to-fiber couplers, and fiber-to-planar waveguide couplers. We present the fabrication and characterization of a 1×n micromechanical fiber-optical switch. The nonoptimized devices show switching times <10 ms with <-1-dB loss. Significant improvements in both parameters appear possible with future refinements. The devices are simple to fabricate, compact, and show considerable promise in the future of fiber-optic networks. Actuation of the switch is accomplished magnetically although other actuation mechanisms are also possible.