• DocumentCode
    1555213
  • Title

    Sintering of Copper Particles for Die Attach

  • Author

    Kähler, Julian ; Heuck, Nicolas ; Wagner, Alexander ; Stranz, Andrej ; Peiner, Erwin ; Waag, Andreas

  • Author_Institution
    Inst. fur Halbleitertech., Tech. Univ. Braunschweig, Braunschweig, Germany
  • Volume
    2
  • Issue
    10
  • fYear
    2012
  • Firstpage
    1587
  • Lastpage
    1591
  • Abstract
    First steps are taken toward a low-cost alternative to silver sintering as a highly reliable die attach technology for deep drilling applications and future power electronic modules. In this feasibility analysis, we evaluate sintering of copper particles for die attach. Particulate copper pastes are pretreated in H2 atmosphere (50 mbar) in order to gain oxide-free particles. Subsequently, particles are sintered at a pressure of 40 N/mm2 and a temperature of 350°C for 2 min. Porosity, Young´s modulus as well as electrical and thermal conductivities of sintered layers are analyzed. Moreover, shear tests at ambient temperature are performed for evaluating the adhesion of monometallic as well as Cu-Au bonds according to the American military standard for chip-substrate contacts (MIL-STD-883H, method 2019.8).
  • Keywords
    Young´s modulus; copper; electrical conductivity; microassembling; porosity; semiconductor device packaging; silver; sintering; thermal conductivity; Ag; American military standard; Cu; MIL-STD-883H method 2019.8; Young´s modulus; adhesion; ambient temperature; chip-substrate contacts; copper particles; copper pastes; deep drilling applications; die attach technology; electrical conductivities; oxide-free particles; porosity; power electronic modules; pressure 50 mbar; shear tests; silver sintering; sintered layers; temperature 350 C; thermal conductivities; time 2 min; Conductivity; Copper; Educational institutions; Microassembly; Powders; Silver; Substrates; Copper; electronics packaging; nanoparticles; semiconductor device packaging;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging and Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    2156-3950
  • Type

    jour

  • DOI
    10.1109/TCPMT.2012.2201940
  • Filename
    6236102