Ion-cyclotron-resonance mass spectrometry with a microwave plasma source

Author

Friedmann, James B. ; Shohet, J. Leon ; Wendt, Amy E.

Author_Institution

Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA

Volume

19

Issue

1

fYear

1991

fDate

2/1/1991 12:00:00 AM

Firstpage

47

Lastpage

51

Abstract

The feasibility of coupling an electron-cyclotron-resonance (ECR) plasma-processing reactor directly to an omegatron mass spectrometer is demonstrated. The ECR plasma is created in a chamber that is coupled to the omegatron through a small, grounded orifice. Ions created in the ECR chamber flow along the magnetic field into the omegatron analysis cell, and the mass spectrum of these ions is recovered. Using this technique the mass spectra of both single-component (He) and two-component (N₂ and N) ECR plasmas were measured. The mass resolution as a function of the omegatron excitation voltage for He and N₂ plasmas was obtained and found to compare well to theoretical calculations

Keywords

helium; mass spectroscopy; nitrogen; plasma applications; plasma diagnostics; plasma production; ECR plasma-processing reactor; He; N₂; N₂-N plasma; excitation voltage; ion-cyclotron-resonance mass spectrometry; mass resolution; microwave plasma source; omegatron mass spectrometer; Magnetic fields; Mass spectroscopy; Plasma applications; Plasma density; Plasma devices; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.62366

Filename

62366