A CAD coupled laser beam test system for digital circuit failure analysis

Author

Fritz, Joachim ; Lackmann, Rainer

Author_Institution

Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, West Germany

Volume

13

Issue

3

fYear

1990

fDate

9/1/1990 12:00:00 AM

Firstpage

490

Lastpage

493

Abstract

An automated contactless testing system that consists of a laser scanning microscope (LSM) coupled with a CAD layout database is described. Logic state detection and automated failure analysis in CMOS circuits can be done without the need of vacuum, and with a minimum of circuit environment preparation. The coupling of the LSM and the CAD layout database leads to automated node location, and minimizes the failure search because it enables the user to backtrace signal interconnections inside the circuit during the local test session

Keywords

CMOS integrated circuits; automatic testing; circuit CAD; failure analysis; integrated circuit testing; logic testing; measurement by laser beam; CAD layout database; CMOS circuits; automated contactless testing system; automated node location; circuit environment preparation; digital circuit failure analysis; failure search; laser beam test system; laser scanning microscope; local test session; logic state detection; signal interconnections; Automatic testing; CMOS logic circuits; Circuit testing; Coupling circuits; Databases; Digital circuits; Laser beams; Microscopy; Optical coupling; System testing;

fLanguage

English

Journal_Title

Components, Hybrids, and Manufacturing Technology, IEEE Transactions on

Publisher

ieee

ISSN

0148-6411

Type

jour

DOI

10.1109/33.58850

Filename

58850