Title :
Low-loss polyimide-Ta2O5-SiO2 hybrid ARROW waveguides
Author :
Chu, A.K. ; Lan, I.J. ; Chang, H.W. ; Sheng, M.H.
Author_Institution :
Inst. of Electro-Optical Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
A low-loss polyimide-Ta2O5-SiO2 hybrid antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW device was fabricated using both the organic and dielectric thin-film technologies. It consists of the fluorinated polyimide, tantalum pentoxide (Ta2O5), and silicon dioxide (SiO2) hybrid layers deposited on a Si substrate. For transverse electric polarized light, the propagation loss of the waveguide as low as 0.4 dB/cm was obtained at 1.31 μm. The propagation loss for transverse magnetic polarized light is 1.5 dB/cm. An ARROW waveguide fabricated using the polyimide-Ta2O5-polyimide material system is also presented for comparison.
Keywords :
integrated optics; light polarisation; optical fabrication; optical losses; optical polymers; optical waveguides; silicon compounds; tantalum compounds; 0.4 dB; 1.31 micron; 1.5 dB; Si; Si substrate; Ta/sub 2/O/sub 5/-SiO/sub 2/; antiresonant reflecting optical waveguide; dielectric thin-film technology; fluorinated polyimide; low-loss polyimide-Ta/sub 2/O/sub 5/-SiO/sub 2/ hybrid ARROW waveguide; organic technology; polyimide-Ta/sub 2/O/sub 5/-polyimide material system; propagation loss; transverse electric polarized light; transverse magnetic polarized light; Optical devices; Optical films; Optical filters; Optical interconnections; Optical polarization; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Polymers;
Journal_Title :
Photonics Technology Letters, IEEE
