Title :
Cylindrical Grating Projection by Single-Shot Normal Exposure of a Radial Phase Mask
Author :
Tonchev, Svetlen ; Jourlin, Yves ; Reynaud, Stéphanie ; Parriaux, Olivier
Author_Institution :
Inst. of Solid State Phys., Sofia, Bulgaria
Abstract :
A periodic grating is defined at the photoresist-coated wall of a circular cylinder with an integer number of particularly long grooves parallel to the generic lines by the holistic exposure of a radial phase mask to a normally incident collimated laser beam. The single-shot projected element corresponds to the inner grating of a high-resolution miniature shaft encoder.
Keywords :
diffraction gratings; laser materials processing; masks; optical fabrication; photoresists; collimated laser beam; cylindrical grating projection; high resolution miniature shaft encoder; long grooves; periodic grating; photoresist coated wall; radial phase mask; single shot normal exposure; Diffraction; Diffraction gratings; Gratings; Indexes; Laser beams; Shafts; Photolithography; cylindrical gratings; phase masks;
Journal_Title :
Photonics Journal, IEEE
DOI :
10.1109/JPHOT.2012.2207096
