Integrated waveguide turning mirror in silicon-on-insulator

Author

Tang, Y.Z. ; Wang, W.H. ; Li, T. ; Wang, Y.L.

Author_Institution

Dept. of Inf. & Sci. Electron. Eng., Zhejiang Univ., Hangzhou, China

Volume

14

Issue

1

fYear

2002

Firstpage

68

Lastpage

70

Abstract

Planar lightwave circuits based on silicon are playing an important role in integrated optical systems. The integrated waveguide turning mirror (IWTM) is an essential component for the compactness of optical devices. We have designed such a mirror with a 90/spl deg/ directional change in silicon-on-insulator (SOI). The fabricated mirror has very small surface roughness. The loss caused by transverse tilt /spl delta//sub t/ and lateral tilt /spl delta//sub l/ is negligible in theory. A 1 /spl times/ 2 beam splitter using the structure is fabricated to test the performance, and turning mirrors of excess loss less than 0.5 dB/mirror are obtained.

Keywords

integrated optics; mirrors; optical fabrication; optical planar waveguides; optical waveguide components; rib waveguides; silicon-on-insulator; surface topography; 0.5 dB; 1 /spl times/ 2 beam splitter; 90/spl deg/ directional change; SOI; Si-SiO/sub 2/; anisotropic etching; integrated waveguide turning mirror; lateral tilt; loss; mirror surface roughness; planar lightwave circuits; silicon-on-insulator; transverse tilt; Circuits; Integrated optics; Mirrors; Optical devices; Optical surface waves; Optical waveguide components; Optical waveguides; Rough surfaces; Silicon on insulator technology; Turning;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.974164

Filename

974164