Towards Tactile Sensing System on Chip for Robotic Applications

Author

Dahiya, Ravinder S. ; Cattin, Davide ; Adami, Andrea ; Collini, Cristian ; Barboni, Leonardo ; Valle, Maurizio ; Lorenzelli, Leandro ; Oboe, Roberto ; Metta, Giorgio ; Brunetti, Francesca

Author_Institution

Bio-MEMS Group, Center for Mater. & Microsyst., Trento, Italy

Volume

11

Issue

12

fYear

2011

Firstpage

3216

Lastpage

3226

Abstract

This paper presents the research on tactile sensing system on chip. The tactile sensing chips comprise of 5 × 5 array of Piezoelectric Oxide Semiconductor Field Effect Transistor (POSFET) devices and temperature sensors. The POSFET devices are obtained by spin coating piezoelectric polymer, poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)), films directly on to the gate area of Metal Oxide Semiconductor (MOS) transistors. The tactile sensing chips are able to measure dynamic contact forces and temperatures. The readout and the data acquisition system to acquire the tactile signals are also presented. The chips have been extensively tested over wide range of dynamic contact forces and temperatures and the experimental results are presented. The paper also reports the research on tactile sensing chips with POSFET array and the integrated electronics.

Keywords

MOS integrated circuits; MOSFET; data acquisition; detector circuits; force sensors; piezoelectric semiconductors; piezoelectric transducers; polymers; readout electronics; robots; spin coating; system-on-chip; tactile sensors; temperature sensors; P(VDF-TrFE); POSFET; contact force measurement; data acquisition system; integrated electronics; metal oxide semiconductor transistor; piezoelectric oxide semiconductor field effect transistor; poly(vinylidene fluoride-trifluoroethylene); readout system; robotic application; spin coating piezoelectric polymer; system on chip; tactile sensing system; temperature measurement; temperature sensor; Humanoid robots; Logic gates; Polymers; Robot sensing systems; Temperature measurement; Temperature sensors; Humanoid robots; POSFET; robotic skin; tactile sensing; touch sensing system on chip;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2011.2159835

Filename

5887375