• DocumentCode
    1556770
  • Title

    Effects of Prestrain Applied to a Polyethylene Terephthalate Substrate Before the Coating of Al-Doped ZnO Film on Film Quality, Electrical Properties, and Pop-In Behavior During Nanoindentation

  • Author

    Li, Tse-Chang ; Han, Chang-Fu ; Wu, Bo-Hsiung ; Hsieh, Po-Tsung ; Lin, Jen-Fin

  • Author_Institution
    Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    21
  • Issue
    5
  • fYear
    2012
  • Firstpage
    1059
  • Lastpage
    1070
  • Abstract
    Four kinds of polyethylene-terephthalate (PET)/Al-doped zinc oxide (AZO) specimen are prepared to examine the effects of prestrain applied to the PET substrate before the coating of the AZO film on the mechanical, material, and electrical properties, and the start of pop-in in the loading phase of nanoindentation. The electrical contact resistance function is used to measure the variations of electrical current during the nanoindentation process. With the aid of the stress-strain profile, the inflection point of the load-depth profile in the loading phase is identified as the start of pop-in, at or nearby which the electrical current sharply increases due to the significant increase in the indenter-film contact area. The pop-in depth decreases with increasing prestrain. The behavior demonstrated in the pop-in depth due to the change in the prestrain is exactly opposite to those of the quantity and the mean size of submicrometer voids/cracks. Increase in the quantity/size of film voids/cracks generally reduces the specimen´s carrier mobility. The carrier mobility is presented to be inversely proportional to the sheet resistance. The electrical current created at the end of the loading process has its value inversely proportional to the number/size of film voids/cracks.
  • Keywords
    II-VI semiconductors; aluminium; carrier mobility; conducting polymers; contact resistance; electrical contacts; electrical resistivity; nanoindentation; semiconductor growth; semiconductor thin films; sputter deposition; sputtered coatings; stress-strain relations; surface cracks; surface resistance; voids (solid); wide band gap semiconductors; zinc compounds; Al-doped ZnO film coating; RF magnetron sputtering; ZnO:Al; carrier mobility; electrical contact resistance function; electrical current; electrical properties; film quality; indenter-film contact area; load-depth profile; mechanical properties; nanoindentation; polyethylene terephthalate substrate; pop-in behavior; prestrain effects; sheet resistance; stress-strain profile; submicrometer voids-cracks; Coatings; Positron emission tomography; Sputtering; Strain; Substrates; Zinc oxide; Defects; ZnO; electrical contact resistance (ECR); pop-in; prestrain;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2012.2205135
  • Filename
    6238294