• DocumentCode
    1557849
  • Title

    Reduced floating body effects in narrow channel SOI MOSFETs

  • Author

    Pretet, J. ; Subba, N. ; Ioannou, Dimitris ; Cristoloveanu, Sorin ; Maszara, W. ; Raynaud, C.

  • Author_Institution
    CNRS, Grenoble, France
  • Volume
    23
  • Issue
    1
  • fYear
    2002
  • Firstpage
    55
  • Lastpage
    57
  • Abstract
    An experimental demonstration is given of the reduction of floating body effects in narrow channel SOI MOSFETs, as manifested by the saturation region subthreshold characteristics, latch-up, and breakdown voltage. The mechanisms responsible for this reduction are explained by original experiments and simulations. These are a deterioration of the carrier lifetime near the channel edges caused by local stress and defects, and a lowering of the source-body built-in potential barrier, resulting from dopant outdiffusion/segregation into the isolation oxide.
  • Keywords
    MOSFET; carrier lifetime; isolation technology; semiconductor device breakdown; silicon-on-insulator; LOCOS isolated devices; Si; breakdown voltage; carrier lifetime deterioration; defects; dopant outdiffusion; dopant segregation; floating body effects reduction; isolation oxide; latch-up; local stress; narrow channel SOI MOSFETs; saturation region subthreshold characteristics; source-body built-in potential barrier lowering; Charge carrier lifetime; Isolation technology; Linear predictive coding; MOSFETs; Physics; Semiconductor device measurement; Silicon on insulator technology; Stress; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.974811
  • Filename
    974811