DocumentCode
1557849
Title
Reduced floating body effects in narrow channel SOI MOSFETs
Author
Pretet, J. ; Subba, N. ; Ioannou, Dimitris ; Cristoloveanu, Sorin ; Maszara, W. ; Raynaud, C.
Author_Institution
CNRS, Grenoble, France
Volume
23
Issue
1
fYear
2002
Firstpage
55
Lastpage
57
Abstract
An experimental demonstration is given of the reduction of floating body effects in narrow channel SOI MOSFETs, as manifested by the saturation region subthreshold characteristics, latch-up, and breakdown voltage. The mechanisms responsible for this reduction are explained by original experiments and simulations. These are a deterioration of the carrier lifetime near the channel edges caused by local stress and defects, and a lowering of the source-body built-in potential barrier, resulting from dopant outdiffusion/segregation into the isolation oxide.
Keywords
MOSFET; carrier lifetime; isolation technology; semiconductor device breakdown; silicon-on-insulator; LOCOS isolated devices; Si; breakdown voltage; carrier lifetime deterioration; defects; dopant outdiffusion; dopant segregation; floating body effects reduction; isolation oxide; latch-up; local stress; narrow channel SOI MOSFETs; saturation region subthreshold characteristics; source-body built-in potential barrier lowering; Charge carrier lifetime; Isolation technology; Linear predictive coding; MOSFETs; Physics; Semiconductor device measurement; Silicon on insulator technology; Stress; Threshold voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.974811
Filename
974811
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