Title :
Reduced floating body effects in narrow channel SOI MOSFETs
Author :
Pretet, J. ; Subba, N. ; Ioannou, Dimitris ; Cristoloveanu, Sorin ; Maszara, W. ; Raynaud, C.
Author_Institution :
CNRS, Grenoble, France
Abstract :
An experimental demonstration is given of the reduction of floating body effects in narrow channel SOI MOSFETs, as manifested by the saturation region subthreshold characteristics, latch-up, and breakdown voltage. The mechanisms responsible for this reduction are explained by original experiments and simulations. These are a deterioration of the carrier lifetime near the channel edges caused by local stress and defects, and a lowering of the source-body built-in potential barrier, resulting from dopant outdiffusion/segregation into the isolation oxide.
Keywords :
MOSFET; carrier lifetime; isolation technology; semiconductor device breakdown; silicon-on-insulator; LOCOS isolated devices; Si; breakdown voltage; carrier lifetime deterioration; defects; dopant outdiffusion; dopant segregation; floating body effects reduction; isolation oxide; latch-up; local stress; narrow channel SOI MOSFETs; saturation region subthreshold characteristics; source-body built-in potential barrier lowering; Charge carrier lifetime; Isolation technology; Linear predictive coding; MOSFETs; Physics; Semiconductor device measurement; Silicon on insulator technology; Stress; Threshold voltage;
Journal_Title :
Electron Device Letters, IEEE