Improvement in ammonia sensing characteristics of titanium dioxide(TiO2) thin film by palladium(Pd) doping

Author

Mukhopadhyay, Amit K.

Author_Institution

Dept. of Electron. & Telecommun. Eng., Jadavpur Univ., Kolkata, India

fYear

2014

fDate

Jan. 31 2014-Feb. 2 2014

Firstpage

91

Lastpage

95

Abstract

A lot of reports are already available about how adding palladium to titanium dioxide improves its gas sensing abilities towards formaldehyde, ethanol, LPG, acetone and methane gases. However, not much has been reported about ammonia gas sensing using palladium doped titanium dioxide thin film. In this work, TiO₂ and Pd doped TiO₂ thin films have been deposited using DC magnetron sputtering. Thereafter, ammonia gas sensing characteristics of these films were investigated. In this paper, it has been shown that there results an improvement in the ammonia gas sensing characteristics of TiO₂ thin film when it is doped with palladium.

Keywords

ammonia; gas sensors; palladium; semiconductor doping; semiconductor thin films; titanium compounds; DC magnetron sputtering; NH₃; TiO₂:Pd; ammonia gas sensing characteristics; palladium doping; titanium dioxide thin film; Films; Gas detectors; Sensitivity; Temperature; Temperature measurement; Temperature sensors; AFM; SEM; XRD; adsorbs; dc magnetron system; donor vacancies; metal oxide semiconductors; optimum operating temperature; partial pressure; receptor function; sensitivity factor(SF); spillover; sputtering; transducer function;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Instrumentation, Energy and Communication (CIEC), 2014 International Conference on

Conference_Location

Calcutta

Type

conf

DOI

10.1109/CIEC.2014.6959056

Filename

6959056