Title :
A microwave generated plasma in a tunable resonant cavity for studies of turbulence in weakly ionized gases
Author :
Podder, N.K. ; Mezonlin, E.D. ; Johnson, J.A., III
Author_Institution :
Center for Nonlinear & Nonequilibrium Aeroscience, Florida A&M Univ., Tallahassee, FL, USA
fDate :
12/1/2001 12:00:00 AM
Abstract :
A microwave plasma in argon is generated inside a pyrex tube by a 3-kW power supply in combination with a magnetron, wave guide, and a resonant cavity. The gas pressure is varied from 200 to 2000 mtorr, and the microwave output power is varied from 600 to 1200 W. Plasma parameters are determined by using a single Langmuir probe. Bias voltage and current characteristic curves are analyzed for the determination of electron temperature, density, and plasma potential. Electron density is found to be in the range of 1.4-7.6 × 1011 cm-3 , electron temperature 4.2-6.2 eV, and plasma potential 22.6-35.6 volts. Turbulence in plasma emissions can now be studied in these various regimes using Ar I lines
Keywords :
Langmuir probes; argon; cavity resonators; electron density; magnetrons; plasma density; plasma pressure; plasma production; plasma temperature; plasma turbulence; 200 to 2000 mtorr; 3 kW; 600 to 1200 W; Ar; Ar I lines; bias voltage; current characteristic curves; density; electron density; electron temperature; gas pressure; magnetron; microwave generated plasma; microwave output power; microwave plasma; plasma emissions; plasma potential; power supply; pyrex tube; resonant cavity; single Langmuir probe; tunable resonant cavity; turbulence; wave guide; weakly ionized gases; Argon; Electrons; Microwave generation; Plasma density; Plasma properties; Plasma temperature; Plasma waves; Power generation; Power supplies; Resonance;
Journal_Title :
Plasma Science, IEEE Transactions on
