Title :
Self-Enclosed Nanofiber-Reinforced PDMS Channels Using Ultrafast Laser Irradiation
Author :
Selvaraj, Hamsapriya ; Tan, Bo ; Venkatakrishnan, Krishnan
Author_Institution :
Dept. of Aerosp. Eng., Ryerson Univ., Toronto, ON, Canada
Abstract :
We report on an innovative method to fabricate self-enclosed reinforced Polydimethylsiloxane (PDMS) microchannels using femtosecond laser pulses of megahertz pulse frequency. It involves nanofibrous structure generation and site-specific curing of PDMS. The rapid curing is due to accumulated heating at repetitive irradiation and can be explained by a volume-constrained temperature rise. The proposed technique permits both reinforcement and rapid curing and is ideal for fabricating reinforced structures in microscale. No additives are used in fabricating the nanofiber-reinforced enclosed channels. Since our method does not require a mask, it is relatively cheaper and faster compared with other conventional lithography techniques.
Keywords :
curing; laser materials processing; lithography; microfluidics; nanofibres; accumulated heating; femtosecond laser pulses; lithography techniques; megahertz pulse frequency; nanofibrous structure generation; rapid curing; repetitive irradiation; self-enclosed nanofiber-reinforced PDMS channels; self-enclosed reinforced polydimethylsiloxane microchannels; site-specific curing; ultrafast laser irradiation; Curing; Heating; Laser beams; Lasers; Polymers; Radiation effects; Silicon; Femtosecond laser; rapid curing; reinforced; self-enclosed;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2012.2205136