Laser trimming of SiON components for integrated optics

Author

Gleine, Wolfgang ; Müller, Jörg

Author_Institution

Tech. Univ. Hamburg, Germany

Volume

9

Issue

11

fYear

1991

fDate

11/1/1991 12:00:00 AM

Firstpage

1626

Lastpage

1629

Abstract

Integrated optical directional couplers were realized by thin SiON films, deposited on silicon substrates by low pressure chemical vapor deposition (LPCVD). To reproduce a desired coupling ratio, a spatially selective trimming of integrated optical components was developed to compensate the technological deviations from ideal values of geometry and refractive index. Starting from the actual coupling ratio, any other value could be obtained by annealing the SiON material with a pulsed CO ₂ laser beam within 3%, by reducing the refractive index of near oxide films

Keywords

CVD coatings; directional couplers; integrated optics; laser beam machining; optical couplers; silicon compounds; LPCVD; Si substrate; coupling ratio; directional couplers; geometry; integrated optics; laser trimming; low pressure chemical vapor deposition; pulsed CO₂ laser beam; refractive index; spatially selective trimming; thin SiON films; Chemical lasers; Directional couplers; Integrated optics; Optical coupling; Optical films; Optical refraction; Optical variables control; Pulsed laser deposition; Refractive index; Semiconductor films;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.97655

Filename

97655