Study of microwave behaviors of cantilever RF MEMS switch

Author

Sha, Rinky ; Mahapatra, Rajat ; Ghatak, Rowdra

Author_Institution

Sch. of Electron. Eng., KIIT Univ., Bhubaneswar, India

fYear

2014

fDate

Jan. 31 2014-Feb. 2 2014

Firstpage

476

Lastpage

479

Abstract

In this paper, RF characterizations of the cantilever MEMS switch have been highlighted. A variety of cantilever MEMS switch designs and their analysis have been performed. Impact of beam thickness and air gap have been utilized in order to achieve high isolation in the Ku band (12-18 GHz) and mutual comparisons of the Al and Au beam structures are analyzed with respect to their performance. RF characterizations of all the structures of cantilever MEMS switch with the Al and Au beam have been carried out by means of Ansoft HFSS v.10, a FEM based simulator for structures operating at a high frequency range.

Keywords

aluminium; cantilevers; finite element analysis; gold; microswitches; microwave switches; Al; Ansoft HFSS v.10; Au; FEM based simulator; Ku band; air gap; beam structures; beam thickness; cantilever RF MEMS switch; frequency 12 GHz to 18 GHz; microwave behaviors; Coplanar waveguides; Gold; Micromechanical devices; Microswitches; Microwave communication; Radio frequency; Structural beams; FEM; HFSS; MEMS; airgap; beam thickness; isolation;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Instrumentation, Energy and Communication (CIEC), 2014 International Conference on

Conference_Location

Calcutta

Type

conf

DOI

10.1109/CIEC.2014.6959134

Filename

6959134