Title :
A process control methodology applied to manufacturing GaAs MMIC´s
Author :
Moran, Peter W. ; Elliott, Scott S. ; Wylie, Neil ; Henderson, Rebecca M. ; del Alamo, Jesús A.
Author_Institution :
MIT, Cambridge, MA, USA
fDate :
11/1/1991 12:00:00 AM
Abstract :
A methodology for guiding process-driven manufacturing organizations in instituting process control on a facility-wide basis is proposed. The methodology begins with defining a specific process and the customer´s expectations of this process, then increases control over the process through four levels: measurable, predictable, acceptable, and recoverable. An application of this methodology to the control of submicron-gate lithography on a GaAs monolithic microwave integrated circuit (MMIC) process is discussed. Experience suggests that the realization of process control is as much a managerial problem as it is a technical one. This application suggests that the proposed methodology serves as a useful conceptual guideline for operators, engineers, and managers in uniformly applying a wide variety of process control tools
Keywords :
III-V semiconductors; MMIC; gallium arsenide; integrated circuit manufacture; lithography; process control; GaAs; MESFET process; MMIC; manufacturing; monolithic microwave integrated circuit; process control methodology; submicron-gate lithography; Application specific integrated circuits; Gallium arsenide; Integrated circuit measurements; Lithography; MMICs; Manufacturing processes; Microwave integrated circuits; Microwave theory and techniques; Monolithic integrated circuits; Process control;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on