High-voltage smart power integrated circuits to drive piezoceramic actuators for microrobotic applications

Author

Montané, E. ; Miribel-Català, P. ; López-Sánchez, J. ; Puig-Vidal, M. ; Bota, S. ; Samitier, J.

Author_Institution

Intrumentation & Comunication Syst., Barcelona Univ., Spain

Volume

148

Issue

6

fYear

2001

fDate

12/1/2001 12:00:00 AM

Firstpage

343

Lastpage

347

Abstract

The development of microrobots is very important in fields where sub-micrometre precision is required. An integrated driving solution based on a commercial BCD (bipolar, CMOS, DMOS) technology is proposed to implement proper drivers for microrobots formed by smart piezoactuator units (SPU). The high voltage signals that demand these actuators are performed by a driver based on a full custom design of a high voltage operational amplifier connected in the inverter configuration. They are able to supply a 50 V sinusoidal waveform at frequencies ranging about 10 kHz with the distortion levels appropriate to the application

Keywords

BIMOS integrated circuits; circuit stability; driver circuits; intelligent actuators; microactuators; microrobots; operational amplifiers; piezoceramics; piezoelectric actuators; power integrated circuits; 10 kHz; 50 V; HV operational amplifier; HV smart power integrated circuits; bipolar-CMOS-DMOS technology; commercial BCD technology; full custom design; high voltage opamp; high voltage signals; high-voltage smart power ICs; inverter configuration; microrobot drivers; microrobotic applications; piezoceramic actuators; sinusoidal waveform; smart piezoactuator units; sub-micrometre precision;

fLanguage

English

Journal_Title

Circuits, Devices and Systems, IEE Proceedings -

Publisher

iet

ISSN

1350-2409

Type

jour

DOI

10.1049/ip-cds:20010712

Filename

980774