• DocumentCode
    1559746
  • Title

    Analytical modeling of quantization and volume inversion in thin Si-film DG MOSFETs

  • Author

    Ge, Lixin ; Fossum, Jerry G.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA
  • Volume
    49
  • Issue
    2
  • fYear
    2002
  • fDate
    2/1/2002 12:00:00 AM
  • Firstpage
    287
  • Lastpage
    294
  • Abstract
    A compact physics-based quantum-effects model for symmetrical double-gate (DG) MOSFETs of arbitrary Si-film thickness is developed and demonstrated. The model, based on the quantum-mechanical variational approach, not only accounts for the thin Si-film thickness dependence but also takes into account the gate-gate charge coupling and the electric field dependence; it can be used for FDSOI MOSFETs as well. The analytical solutions, verified via results obtained from self-consistent numerical solutions of the Poisson and Schrodinger equations, provide good physical insight with regard to the quantization and volume inversion due to carrier confinement, which is governed by the Si-film thickness and/or the transverse electric field. A design criterion for achieving beneficial volume-inversion operation in DG devices is quantitatively defined for the first time. Furthermore, the utility of the model for aiding optimal DG device design, including exploitation of the volume-inversion benefit to carrier mobility, is exemplified
  • Keywords
    MOSFET; Poisson equation; Schrodinger equation; carrier mobility; electric fields; elemental semiconductors; inversion layers; numerical analysis; semiconductor device models; semiconductor thin films; silicon; variational techniques; DG devices; FDSOI MOSFETs; Poisson equation; Schro¨dinger equation; Si-film thickness; SiO2-Si; analytical modeling; carrier confinement; carrier mobility; design criterion; electric field dependence; gate-gate charge coupling; numerical solutions; optimal DG device design model; physics-based quantum-effects model; quantization; quantum-mechanical variational approach; symmetrical double-gate MOSFETs; thin Si-film thickness dependence; transverse electric field; volume inversion; volume-inversion operation; Analytical models; CMOS technology; Carrier confinement; Couplings; MOSFETs; Poisson equations; Potential well; Quantization; Quantum capacitance; Thin film devices;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.981219
  • Filename
    981219