DocumentCode
1560290
Title
Fabrication and characterization of hydrogel-based microvalves
Author
Liu, Robin H. ; Yu, Qing ; Beebe, David J.
Author_Institution
Beckman Inst. for Adv. Sci. & Technol., Illinois Univ., Urbana, IL, USA
Volume
11
Issue
1
fYear
2002
fDate
2/1/2002 12:00:00 AM
Firstpage
45
Lastpage
53
Abstract
Several microvalves utilizing stimuli-responsive hydrogel materials have been developed. The hydrogel components are fabricated inside microchannels using a liquid phase polymerization process. In-channel processing greatly simplifies device construction, assembly, and operation since the functional components are fabricated in situ and can perform both sensing and actuation functions. Two in situ photopolymerization techniques, "laminar stream mode" and "mask mode," have been explored. Three two-dimensional (2-D) valves were fabricated and tested (response time, pressure drop, maximum differential pressure). In addition, a hydrogel/PDMS three-dimensional (3-D) hybrid valve that physically separates the sensing and regulated streams was demonstrated. Analytical modeling was performed on the 3-D valve. Hydrogel-based microvalves have a number of advantages over conventional microvalves, including relatively simple fabrication, no external power requirement, no integrated electronics, large displacement (185 μm), and large force generation (22 mN)
Keywords
laminar flow; microvalves; polymerisation; 185 micron; 2D valves; 3D hybrid valve; displacement; force generation; hydrogel-based microvalves; in-channel processing; laminar stream mode; liquid phase polymerization process; maximum differential pressure; microchannels; pressure drop; response time; stimuli-responsive hydrogel materials; Assembly; Delay; Fabrication; Microchannel; Microvalves; Performance analysis; Polymers; Testing; Two dimensional displays; Valves;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.982862
Filename
982862
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