Author :
Wolffenbuttel, R.F. ; Van Mullem, C.J.
Author_Institution :
Delft University of Technology, ITS Laboratory for Electronic Instrumentation/DIMES
Keywords :
Collaboration; Fabrication; Instrumentation and measurement; Instruments; Metrology; Multidimensional systems; Packaging; Sensor systems; Silicon; Stability;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2001.982929
