DocumentCode

1560356

Title

Guest editorial

Author

Wolffenbuttel, R.F. ; Van Mullem, C.J.

Author_Institution

Delft University of Technology, ITS Laboratory for Electronic Instrumentation/DIMES

Volume

50

Issue

6

fYear

2001

Firstpage

1467

Lastpage

1468

Keywords

Collaboration; Fabrication; Instrumentation and measurement; Instruments; Metrology; Multidimensional systems; Packaging; Sensor systems; Silicon; Stability;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2001.982929

Filename

982929