Title :
Testing of a microanalysis system
Author :
Kerkhoff, Hans G.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
12/1/2001 12:00:00 AM
Abstract :
During the testing of microsystems, one has to cope with many problems resulting from inaccessibility, different technologies, and nonelectrical failure modes. A number of mixed-signal test techniques have been applied to test a new advanced microsystem. The choices on testing are directly dependent on implementation form and application area of the microsystem. Mixed-signal testing approaches are a key factor in this environment
Keywords :
chemical analysis; chemical sensors; integrated circuit testing; microfluidics; micropumps; microsensors; mixed analogue-digital integrated circuits; CCD array; LED array activation; analog signal processing; digital signal processing; flow-sensor; fluidics system testing; functional testing; known good substrate; microanalysis system; microfluid channels; micropump; microsystem testing; mixed-signal test techniques; optical-absorption sensor; portable instant chemical analyzer; well-known good die; Actuators; Analog-digital conversion; Built-in self-test; Computer aided manufacturing; Design for testability; Fluidics; Helium; Mechanical sensors; Micromechanical devices; System testing;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
