Title :
A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm
Author :
Haitjema, Han ; Pril, Wouter ; Schellekens, P.H.J.
Author_Institution :
Sect. Precision Eng., Eindhoven Univ. of Technol., Netherlands
fDate :
12/1/2001 12:00:00 AM
Abstract :
The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs are given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes are given and possible future developments are discussed
Keywords :
calibration; elemental semiconductors; etching; inspection; micromachining; microsensors; silicon; spatial variables measurement; strain gauges; 3D coordinate measurements; CMM probe; MEMS; Si; accurate coordinate measurements; accurate dimensional inspection; calibration; flexure hinges; integrated strain gages; silicon-etched probe; touch trigger probe; Coordinate measuring machines; DVD; Electrical resistance measurement; Etching; Fasteners; Measurement uncertainty; Position measurement; Precision engineering; Probes; Silicon;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
