Title :
An improved experimental setup for electrostatic discharge (ESD) measurements based on transmission line pulsing technique
Author :
Lee, Jui-Chu ; Young, R. ; Liou, Juin J. ; Croft, G.D. ; Bernier, Joseph C.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Central Florida, Orlando, FL, USA
fDate :
12/1/2001 12:00:00 AM
Abstract :
Transmission line pulsing (TLP) is a useful technique to characterize electrostatic discharge (ESD) events in semiconductor devices. The pulse waveforms generated by a typical TLP setup, however, are often distorted and oscillatory. In this paper, a new and simple experimental setup is developed to improve the shape of the TLP waveforms and thus to increase the effectiveness of the TLP technique. Experimental results obtained from the conventional and improved setups are presented and compared
Keywords :
charge measurement; electrostatic discharge; equivalent circuits; impedance matching; pulse generators; semiconductor device measurement; waveform generators; coaxial cable; electrostatic discharge measurements; equivalent circuit; human body model; improved voltage probe; matched load circuit; pulse waveforms; semiconductor devices; time-domain measurements; transient waveforms; transmission line pulsing technique; undesirable waveform spiking; Circuit testing; Coaxial cables; Distributed parameter circuits; Electrostatic discharge; Electrostatic measurements; Equivalent circuits; Pulse generation; Semiconductor device measurement; Semiconductor devices; Transmission line measurements;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
