An improved experimental setup for electrostatic discharge (ESD) measurements based on transmission line pulsing technique

Author

Lee, Jui-Chu ; Young, R. ; Liou, Juin J. ; Croft, G.D. ; Bernier, Joseph C.

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Univ. of Central Florida, Orlando, FL, USA

Volume

50

Issue

6

fYear

2001

fDate

12/1/2001 12:00:00 AM

Firstpage

1808

Lastpage

1814

Abstract

Transmission line pulsing (TLP) is a useful technique to characterize electrostatic discharge (ESD) events in semiconductor devices. The pulse waveforms generated by a typical TLP setup, however, are often distorted and oscillatory. In this paper, a new and simple experimental setup is developed to improve the shape of the TLP waveforms and thus to increase the effectiveness of the TLP technique. Experimental results obtained from the conventional and improved setups are presented and compared

Keywords

charge measurement; electrostatic discharge; equivalent circuits; impedance matching; pulse generators; semiconductor device measurement; waveform generators; coaxial cable; electrostatic discharge measurements; equivalent circuit; human body model; improved voltage probe; matched load circuit; pulse waveforms; semiconductor devices; time-domain measurements; transient waveforms; transmission line pulsing technique; undesirable waveform spiking; Circuit testing; Coaxial cables; Distributed parameter circuits; Electrostatic discharge; Electrostatic measurements; Equivalent circuits; Pulse generation; Semiconductor device measurement; Semiconductor devices; Transmission line measurements;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.982985

Filename

982985