Analogue characterization of horizontal bars capacitors for smart power applications

Horizontal bars capacitors are important for smart power technologies. To perform an analogue characterization of the capacitors at different temperatures and bias voltages, a novel technique based on CBCM has been developed. The unit capacitance, the temperature coefficients and the voltage linearity coefficients of the horizontal bars capacitors have been successfully extracted by the technique. The technique is proven with high resolution, high flexibility and low cost.