Title :
Rapid mapping of AR coating thickness on Si solar cells using GT-FabScan 6000
Author :
Sopori, Bhushan ; Amieva, Juana ; Butterfield, Brian ; Li, Chuan
Author_Institution :
Nat. Renewable Energy Lab., Golden, CO, USA
Abstract :
A new technique for rapid mapping of the thickness, of an antireflection (AR) coating on a solar cell is described. A filtered, reflectance (intensity) image of the AR-coated wafer is generated by a CCD camera mounted on a GTFabScan. This image is converted into a thickness image using a transformation relating local AR thickness to the local intensity in the image plane. The thickness map is generated in <100 ms.
Keywords :
CCD image sensors; antireflection coatings; elemental semiconductors; silicon; solar cells; thickness measurement; CCD camera; GT-FabScan 6000; Si; antireflection coating; coating thickness; filtered image; mapping; reflectance image; solar cells; thickness image; Coatings; Hydrogen; Metallization; Optical films; Passivation; Photovoltaic cells; Reflectivity; Refractive index; Solar power generation; Thickness measurement;
Conference_Titel :
Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE
Print_ISBN :
0-7803-8707-4
DOI :
10.1109/PVSC.2005.1488287
