Title :
RGTO: a new technique for preparing SnO/sub 2/ sputtered thin film as gas sensors
Author :
Sberveglieri, G. ; Faglia, G. ; Groppelli, S. ; Nelli, P.
Author_Institution :
Dept. of Ind. Autom., Brescia Univ., Italy
Abstract :
A technique for the preparation of SnO/sub 2/ thin films by means of RF magnetron sputtering is presented. This technique, rheotaxial growth and thermal oxidation (RGTO), makes it possible to obtain thin films formed by polycrystalline grains, connected by necks and with high surface areas. SnO/sub 2/ thin films grown with this method and 300 nm thick show high sensitivity to such gases as H/sub 2/, C/sub 4/H/sub 10/, and C/sub 2/H/sub 5/OH. SEM (scanning electron microscope) analysis shows that these films are formed by grains with a diameter of 500-1500 mm which are randomly connected. XRD (X-ray diffraction) analysis shows that the SnO/sub 2/ thin films are preferentially oriented in the
Keywords :
electric sensing devices; electrical conductivity of crystalline semiconductors and insulators; electronic conduction in crystalline semiconductor thin films; gas sensors; hydrogen; organic compounds; semiconductor devices; semiconductor materials; sputter deposition; sputtered coatings; thin film devices; tin compounds; 0.19 to 0.21 eV; 373 K; 500 to 1500 mm; 535 K; H/sub 2/; RF magnetron sputtering; SEM; SnO/sub 2/; SnO/sub 2/ sputtered thin film; X-ray diffraction analysis; butane; ethanol; gas sensor; organic compounds; polycrystalline grains; rheotaxial growth; scanning electron microscope; temperature stimulated conductance; thermal oxidation; Gases; Neck; Oxidation; Radio frequency; Scanning electron microscopy; Sputtering; Temperature measurement; Temperature sensors; Transistors; X-ray scattering;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148829
