DocumentCode
1561384
Title
Self assembly of microcomponents on patterned substrate using capillary force
Author
Balakrishnan, S. ; Kripesh, V. ; Siong, Teo Poi ; Iyer, Mahadevan K.
Author_Institution
Inst. of Microelectron., Singapore
Volume
1
fYear
2005
Abstract
In recent times there are many publications on guided self-assembly to generate heterogeneous and/or functional integrations, particularly in microelectronics area. A promising approach attempted in this investigation is self-assembly using capillary forces. In this approach, microcomponents flow over a target substrate patterned with binding sites, and part-substrate attachment and alignment occurs spontaneously due to free energy minimization of the binding site (e.g., a liquid column of lubricant). Silicon die chiplets (1 times 1 mm) are diced from gold sputtered and patterned 8" wafer. Correspondingly matching gold pattern arrays (10 times 10) made on 8" silicon wafer. Each gold pattern array is about 3times3 cm dimensions. Prior to assembly, both dies and gold patterned substrates were treated with thiol based self assembled monolayer (SAM). After SAM treatments on the substrate, lubricant is immobilized. Later the lubricant immobilized substrate wafer placed in a water bath. SAM treated dies allowed to pass on the substrate. The hydrophobic SAM treated face of the die attracted by hydrophobic lubricant sites on the substrate and assembled spontaneously aided by capillary force. Minimization of the free energy of the lubricant-water interface provided the driving force for the assembly. The X-ray diffraction characterizations of gold depositions are also performed to select gold deposition technique
Keywords
X-ray diffraction; gold; microassembling; monolayers; self-assembly; silicon; sputter deposition; substrates; Au; Si; X-ray diffraction; capillary force; free energy minimization; gold deposition technique; gold pattern arrays; hydrophobic SAM; hydrophobic lubricant sites; lubricant immobilized substrate wafer; lubricant-water interface; microcomponent self assembly; microcomponents flow; part-substrate alignment; part-substrate attachment; patterned substrates; self assembled monolayer; silicon die chiplets; Assembly; Gold; Lubricants; Manufacturing; Microelectronics; Pattern matching; Power generation economics; Self-assembly; Silicon; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology Conference, 2005. EPTC 2005. Proceedings of 7th
Conference_Location
Singapore
Print_ISBN
0-7803-9578-6
Type
conf
DOI
10.1109/EPTC.2005.1614384
Filename
1614384
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