Title :
Nanolaboratory - a prototype nanomanufacturing system
Author :
Fukuda, Toshio ; Arai, Fumihito ; Dong, Lixin ; Nakajima, Masahiro
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
A nanolaboratory - a prototype nanomanufacturing system is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-of-freedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, and nanotube scissors are fabricated in the nanolaboratory.
Keywords :
atomic force microscopy; carbon nanotubes; cold-cathode tubes; electron beam deposition; manufacturing systems; nanotechnology; nanotube devices; scanning electron microscopy; 16 degrees of freedom; atomic force microscope cantilevers; electron beam induced deposition; field emission scanning electron microscope; linear bearing; mass flow sensor; measurement system; nanofabrication system; nanolaboratory; nanorobotic manipulation system; nanotube cold cathode; nanotube devices; nanotube probes; nanotube scissors; piezoresistive levers; precursor evaporation reservoir; prototype nanomanufacturing system; real time observation; thermal field emission electron source; Atomic force microscopy; Atomic measurements; Electron sources; Fabrication; Force measurement; Nanoscale devices; Prototypes; Reservoirs; Scanning electron microscopy; Thermal force;
Conference_Titel :
Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on
Print_ISBN :
0-7803-8273-0
DOI :
10.1109/WCICA.2004.1342088
