DocumentCode
1562123
Title
Choice and fabrication of microspectrometer components
Author
Zhang, Chengmei ; Mei, Tao ; Kong, Deyi
Author_Institution
Inst. of Intelligent Machines, Chinese Acad. of Sci., Hefei, China
Volume
5
fYear
2004
Firstpage
3850
Abstract
Spectrometers are basically composed of three components: (1) dispersive element; (2) detectors and (3) optical path. There are many ways to realize them. By analysis and comparison the optimal choice and fabrication process of the three components in microspectrometer is described. The choice of components must be considered overall from performance, complexity of fabrication and dimension scale of the full microspectrometer systems.
Keywords
CCD image sensors; Fabry-Perot interferometers; diffraction gratings; infrared detectors; infrared spectrometers; micro-optics; microlenses; optical fabrication; visible spectrometers; CCD image sensors; Fabry-Perot interferometers; detectors; diffraction gratings; dispersive element; fabrication process; microlenses; microspectrometer components; optical path; sputter etching; Biomedical optical imaging; Dispersion; Electron beams; Gratings; Lenses; Optical arrays; Optical device fabrication; Optical devices; Optical refraction; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on
Print_ISBN
0-7803-8273-0
Type
conf
DOI
10.1109/WCICA.2004.1342211
Filename
1342211
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