Measurement technique of in-plane motion for MEMS based on blur image synthesis

Author

Jin, Cuiyun ; Li, Dachao ; Wang, Likun ; Jin, Shijiu ; Feng, Yalin ; Hao, Yilong

Author_Institution

Precision Meas. Technol. & Instrum., Tianjin Univ., China

Volume

5

fYear

2004

Firstpage

3871

Abstract

Testing technique is more and more important in the industrialization of research and development of MEMS. Based on machine micro-vision dynamic testing system for MEMS is established. The technique of blur image synthesis is presented to extract and analyze in-plane motion characteristics of MEMS devices. Image processing method is used to carry out frequency sweep and voltage sweep measurements. The in-plane motion characteristics of MEMS are obtained and the testing results are analyzed and discussed. The resolution and repeatability of the method can obtain to 100 nm.

Keywords

computer vision; dynamic testing; frequency measurement; image restoration; micromechanical devices; motion measurement; research and development; voltage measurement; 100 nm; MEMS devices; blur image synthesis; dynamic testing system; frequency sweep measurement; image processing; inplane motion measurement technique; machine microvision system; research and development; voltage sweep measurement; Image analysis; Image generation; Image motion analysis; Image processing; Measurement techniques; Microelectromechanical devices; Micromechanical devices; Motion analysis; Research and development; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on

Print_ISBN

0-7803-8273-0

Type

conf

DOI

10.1109/WCICA.2004.1342216

Filename

1342216