Title :
A porous actuator for an ISFET-based coulometric sensor-actuator system
Author :
Luo, J. ; Olthuis, W. ; Bergveld, P. ; Bos, M. ; van der Linden, W.E.
Author_Institution :
Twente Univ., Enschede, Netherlands
Abstract :
The previously developed prototype ISFET (ion-sensitive field effect transistor)-based coulometric sensor-actuator system suffers from delay in response due to the nonzero distance between the sensor and actuator. The authors describe a novel configuration of a sensor-actuator device which employs a porous noble metal electrode as the actuator closely spaced around and over the gate of the ISFET. The novel device was characterized by performing an acid-to-base titration. The results showed that the delay time was considerably reduced. The titration times were found to be from 0.1 to 4.0 s. The corresponding concentrations of titrated species were from 0.5 to 15 mM.<>
Keywords :
electric sensing devices; electrochemical analysis; electrochemical electrodes; insulated gate field effect transistors; porous materials; 0.1 to 4 s; ISFET-based coulometric sensor-actuator system; acid-to-base titration; delay time; noble metal electrode; porous actuator; titration times; Actuators; Biochemistry; Biomembranes; Chemical sensors; Delay effects; Etching; Gas detectors; Gold; Prototypes; Sensor systems;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148844
