Title :
Large-area, light-weight, flexible solar cell production technology: ready for market entry
Author :
Tanda, Masayuki ; Tabuchi, Katsuya ; Uno, Masayoshi ; Kato, Shinji ; Takeda, Yukio ; Iwasaki, Shinji ; Yokohama, Y. ; Wada, Takehito ; Shimosawa, Makoto ; Sakakibara, Yasushi ; Takano, Akihiro ; Nishihara, Hironori ; Enomoto, Hirofumi ; Kamoshita, Tomoyos
Author_Institution :
Fuji Electr. Adv. Technol. Co., Ltd., Yokosuka, Japan
Abstract :
We have been developing roll-to-roll production technologies of amorphous-silicon solar cell on plastic-film substrates. In this paper, newly developed deposition methods of (1) excitation-frequency controlled plasma-enhanced chemical vapor deposition of amorphous silicon, (2) selective reactive sputtering of metal electrode with low substrate temperature and (3) deposition of large-area uniform transparent conductive oxide are described. The solar cells were applied to 4 m-long light-weight and large-area building-integrated modules.
Keywords :
amorphous semiconductors; elemental semiconductors; indium compounds; plasma CVD; semiconductor device manufacture; silicon; solar cells; sputter deposition; 4 m; ITO; InSnO; Si; amorphous-silicon solar cell; excitation-frequency controlled plasma-enhanced chemical vapor deposition; metal electrode; plastic-film substrates; roll-to-roll production technologies; selective reactive sputtering; solar cell production technology; substrate temperature; transparent conductive oxide; Amorphous silicon; Chemical technology; Chemical vapor deposition; Electrodes; Photovoltaic cells; Plasma chemistry; Plasma temperature; Production; Sputtering; Temperature control;
Conference_Titel :
Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE
Print_ISBN :
0-7803-8707-4
DOI :
10.1109/PVSC.2005.1488442
