• DocumentCode
    1562525
  • Title

    Microresonators for Photonic Integrated Circuits

  • Author

    Dapkus, P.Daniel ; Peng, Zhen ; Hwang, Eui-Hyun ; Yang, Qi ; Stewart, Lawrence

  • Author_Institution
    University of Southern California, 3651 Watt Way, Los Angeles, CA 90089-0243. dapkus@usc.edu
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    High-Q, low loss microdisks vertically coupled to buried bus waveguides were designed and fabricated using selective area deep etching with multi-level masks. The technology combines low loss waveguides with the ability to integrate active functionalities.
  • Keywords
    Coupling circuits; Etching; Indium phosphide; Integrated circuit technology; Microcavities; Optical filters; Optical losses; Optical resonators; Optical waveguides; Photonic integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber communication/National Fiber Optic Engineers Conference, 2008. OFC/NFOEC 2008. Conference on
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    978-1-55752-856-8
  • Electronic_ISBN
    978-1-55752-588-1
  • Type

    conf

  • DOI
    10.1109/OFC.2008.4528759
  • Filename
    4528759
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1562525