Title :
Microresonators for Photonic Integrated Circuits
Author :
Dapkus, P.Daniel ; Peng, Zhen ; Hwang, Eui-Hyun ; Yang, Qi ; Stewart, Lawrence
Author_Institution :
University of Southern California, 3651 Watt Way, Los Angeles, CA 90089-0243. dapkus@usc.edu
Abstract :
High-Q, low loss microdisks vertically coupled to buried bus waveguides were designed and fabricated using selective area deep etching with multi-level masks. The technology combines low loss waveguides with the ability to integrate active functionalities.
Keywords :
Coupling circuits; Etching; Indium phosphide; Integrated circuit technology; Microcavities; Optical filters; Optical losses; Optical resonators; Optical waveguides; Photonic integrated circuits;
Conference_Titel :
Optical Fiber communication/National Fiber Optic Engineers Conference, 2008. OFC/NFOEC 2008. Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-55752-856-8
Electronic_ISBN :
978-1-55752-588-1
DOI :
10.1109/OFC.2008.4528759
