Integrated shadow mask for full angle deposition in fabrication of passive matrix OLED displays

This paper reports a novel structural design of an integrated shadow mask and its fabrication process that can be used for fabrication of passive matrix OLED displays. The integrated shadow mask is composed of two components: laterally spaced and electrically insulating pillars with retrograded side walls and humps disposed nearby the retrograde side walls. The structure is designed such that dead corner areas against various deposition angles are formed in between the humps and the side walls. The novel mask structure has been realized with common photoresist materials and standard photolithography process. The new integrated mask allows full angle metal deposition while effective cathode strip separation is achieved for mass production of passive matrix OLED panels. The viability of the new mask structure and its applicability has been demonstrated with passive matrix OLED prototypes in the authors´ lab