CMOS integrated gas sensor chip using SAW technology

Author

Ahmadi, Shahrokh ; Korman, Can ; Zaghloul, Mona ; Huang, Kuan-Hsun

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA

Volume

4

fYear

2003

Abstract

The development of inexpensive and miniaturized SAW gas sensors that are highly selective and sensitive is introduced. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. Since the sensors are fabricated on a silicon substrate, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions such as multiplexing and analog-to-digital conversion that are needed for integration into a network.

Keywords

CMOS integrated circuits; analogue-digital conversion; gas sensors; microsensors; mixed analogue-digital integrated circuits; surface acoustic wave delay lines; surface acoustic wave sensors; surface acoustic wave signal processing; CMOS integrated gas sensor chip; CMOS technology; MEMS; SAW delay line oscillators; SAW technology; analog-to-digital conversion; inexpensive miniaturized SAW gas sensors; micro-electro-mechanical systems; multiplexing; signal processing circuitry integration; silicon substrate; Analog-digital conversion; CMOS technology; Gas detectors; Integrated circuit technology; Microelectromechanical systems; Micromechanical devices; Sensor systems; Signal processing; Silicon; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on

Print_ISBN

0-7803-7761-3

Type

conf

DOI

10.1109/ISCAS.2003.1206353

Filename

1206353