Title :
Fabrication process for a microfluidic valve
Author :
Luque, Antonio ; Quero, José M. ; Hibert, Cyrille ; Flückiger, Philippe
Author_Institution :
Univ. de Sevilla, Spain
Abstract :
In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.
Keywords :
electrostatic actuators; high-pressure techniques; microfluidics; microvalves; Si; air balanced pressure; electrostatic parallel-plate actuator; fabrication process; high pressure valve; microfluidic valve; microsystem foundries; operational behaviour; Biomembranes; Dielectric substrates; Electrostatics; Fabrication; Foundries; Medical treatment; Microfluidics; Orifices; Silicon; Valves;
Conference_Titel :
Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
Print_ISBN :
0-7803-7761-3
DOI :
10.1109/ISCAS.2003.1206356
