• DocumentCode
    1562888
  • Title

    Fabrication process for a microfluidic valve

  • Author

    Luque, Antonio ; Quero, José M. ; Hibert, Cyrille ; Flückiger, Philippe

  • Author_Institution
    Univ. de Sevilla, Spain
  • Volume
    4
  • fYear
    2003
  • Abstract
    In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.
  • Keywords
    electrostatic actuators; high-pressure techniques; microfluidics; microvalves; Si; air balanced pressure; electrostatic parallel-plate actuator; fabrication process; high pressure valve; microfluidic valve; microsystem foundries; operational behaviour; Biomembranes; Dielectric substrates; Electrostatics; Fabrication; Foundries; Medical treatment; Microfluidics; Orifices; Silicon; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
  • Print_ISBN
    0-7803-7761-3
  • Type

    conf

  • DOI
    10.1109/ISCAS.2003.1206356
  • Filename
    1206356
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1562888