Title :
Physical properties of integral inductance of strip MEMS - A coil at SHF
Author :
Sapogin, V.G. ; Prokopenko, Nikolay N. ; Budyakov, A.S.
Author_Institution :
Inst. of Nanotechnol., Electron. & Instrum. Eng. of Southern Fed. Univ., Taganrog, Russia
Abstract :
Physical properties of the classic method of analysis for strip MEMS - coils are discussed. In calculation the scale of inductance has been assigned and canonical relations for calculation of inductance and flux linkage have been obtained. From relations the feasibility of two classes of inductances with the small (in comparison with the scale) flux and great one follows. It is shown that under a fixed number of turns and cross-section square that coil has more inductance at less volume, whose axial width of the strip is less. The evaluation of inductance of MEMS - coil, which satisfactorily coincides with observable one, is adduced at SHF up to cutoff frequency.
Keywords :
coils; micromechanical devices; SHF; coil; cross-section square; flux linkage; integral inductance; physical property; strip MEMS; Micromechanical devices;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959567