Title :
Structure of ceramic substrates of microwave hybrid integrated circuits modified by laser radiation
Author :
Savruk, E.V. ; Smirnov, S.V.
Author_Institution :
Tomsk State Univ. of Control Syst. & Radioelectron., Tomsk, Russia
Abstract :
Study results for a near-surface layer of aluminum oxide ceramics substrates for microwave hybrid IC´s (MHIC´s) are presented. Layers are produced by treatment of laser beam (1.06 μm wavelength) exposure - laser treatment. It is shown that there is a formation of a texture of chevron type and non-stoichiometric surface layer towards the lack of oxygen, as well as an increase of coefficient of fracture toughness for 6% after laser treatment and melting.
Keywords :
aluminium compounds; ceramics; hybrid integrated circuits; laser beam applications; microwave integrated circuits; AlO; MHIC; ceramic substrates; chevron type; fracture toughness; laser beam treatment; laser radiation; melting; microwave hybrid integrated circuits; near-surface layer; nonstoichiometric surface layer; wavelength 1.06 mum; Lead; Masers; Microwave FET integrated circuits; Microwave integrated circuits;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959585
