DocumentCode
156393
Title
Influence of electric field strength on electrochemical formation of macroporous silicon with ordered pore positions
Author
Lazarouk, S.K. ; Dolbik, A.V. ; Turtsevich, A.S. ; Shvedau, S.V. ; Labunov, V.A.
Author_Institution
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
fYear
2014
fDate
7-13 Sept. 2014
Firstpage
728
Lastpage
729
Abstract
Studying of electric field influence on macroporous silicon formation has been conducted. We have found that formation of the ordered macroporous structure took place at electric field strength exceeding 109 V/m. The electric field strength less than above-mentioned value results in pore extension and following pore splitting in two.
Keywords
electroforming; elemental semiconductors; porous semiconductors; semiconductor growth; silicon; Si; electric field strength; electrochemical formation; macroporous silicon formation; ordered macroporous structure formation; ordered pore positions; pore extension; pore splitting; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-966-335-412-5
Type
conf
DOI
10.1109/CRMICO.2014.6959605
Filename
6959605
Link To Document