Title :
Investigation of forming nanoclusters of germanium and silicon ??? germanium solid in LPCVD process
Author :
Kovalevsky, A.A. ; Strogova, A.S. ; Strogova, N.S. ; Borisevich, V.M.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
Abstract :
The process of self-organization and evolution of the stable perfectly-ordered nanoclusters of Si, Ge and SiGe solid solution in thin-film deposition process of the germanium-alloyed silicon for the new generation electronic devices is studied.
Keywords :
electroforming; elemental semiconductors; laser deposition; nanostructured materials; plasma CVD; LPCVD process; electronic devices; germanium solid solution; nanocluster forming; silicon solid solution; silicon-germanium solid solution; stable perfectly-ordered nanocluster evolution; stable perfectly-ordered nanocluster self-organization process; thin-film deposition process; Germanium;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959608
