Title :
Local degradation of magnetic properties in magnetic thin films irradiated by Ga/sup +/ focused-ion-beams
Author :
Chang-Min Park ; Bain, J.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
Summary form only given. The effects of local Ga/sup +/ focused ion beam (FIB) irradiation on magnetic properties in Permalloy and FeCoN thin films were investigated, as relevant to magnetic head pole trimming. FIB etching was performed using 50 keV Ga/sup +/ in a Micrion 2500. Magnetic properties for irradiated areas were characterized utilizing the longitudinal magneto-optic Kerr effect. For chemical analyses of irradiated areas, energy dispersive X-ray (EDX) analyses were performed.
Keywords :
Kerr magneto-optical effect; Permalloy; X-ray chemical analysis; cobalt compounds; ferromagnetic materials; focused ion beam technology; ion beam effects; iron compounds; magnetic heads; magnetic hysteresis; magnetic thin films; sputter etching; EDX analyses; FIB etching; FeCoN; Ga/sup +/ focused ion beam irradiation; NiFe; Permalloy; coercivity; local magnetic properties degradation; longitudinal magneto-optic Kerr effect; magnetic head pole trimming; magnetic hysteresis loops; magnetic thin films; surface damage; Chemical analysis; Degradation; Dispersion; Etching; Ion beams; Kerr effect; Magnetic films; Magnetic heads; Magnetic properties; Magnetooptic effects;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1000678
