Local degradation of magnetic properties in magnetic thin films irradiated by Ga/sup +/ focused-ion-beams

Author

Chang-Min Park ; Bain, J.A.

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2002

Abstract

Summary form only given. The effects of local Ga/sup +/ focused ion beam (FIB) irradiation on magnetic properties in Permalloy and FeCoN thin films were investigated, as relevant to magnetic head pole trimming. FIB etching was performed using 50 keV Ga/sup +/ in a Micrion 2500. Magnetic properties for irradiated areas were characterized utilizing the longitudinal magneto-optic Kerr effect. For chemical analyses of irradiated areas, energy dispersive X-ray (EDX) analyses were performed.

Keywords

Kerr magneto-optical effect; Permalloy; X-ray chemical analysis; cobalt compounds; ferromagnetic materials; focused ion beam technology; ion beam effects; iron compounds; magnetic heads; magnetic hysteresis; magnetic thin films; sputter etching; EDX analyses; FIB etching; FeCoN; Ga/sup +/ focused ion beam irradiation; NiFe; Permalloy; coercivity; local magnetic properties degradation; longitudinal magneto-optic Kerr effect; magnetic head pole trimming; magnetic hysteresis loops; magnetic thin films; surface damage; Chemical analysis; Degradation; Dispersion; Etching; Ion beams; Kerr effect; Magnetic films; Magnetic heads; Magnetic properties; Magnetooptic effects;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

0-7803-7365-0

Type

conf

DOI

10.1109/INTMAG.2002.1000678

Filename

1000678