Title :
Influence of residual gas pressure and ion implantation on the properties of nitride high-entropy alloys (TiZrAlYNb)N
Author :
Yakushchenko, I.V. ; Sobol, O.V. ; Beresnev, V.M. ; Kupshishin, A.I. ; Bondar, O.V. ; Amekura, H. ; Kono, Kenji ; Oyoshi, K. ; Takeda, Y. ; Lisovenko, M.O.
Author_Institution :
Sumy State Univ., Sumy, Ukraine
Abstract :
Using methods of electronic and atomic-force microscopy, energy-dispersive analysis, laser scanning microscopy, X-ray diffraction, hardness measurements the nitrides of high-entropy alloys (TiZrAlYNb)N, obtained by cathodic-vacuum-arc-vapor-deposition, were investigated. Influence of residual gas pressure on the properties of investigated nitrides was found. In addition, comparison of structure and phase analysis of investigated coatings before and after ion implantation of the heavy negative charged Au- was conducted.
Keywords :
X-ray chemical analysis; X-ray diffraction; aluminium compounds; atomic force microscopy; electron microscopy; hardness; ion implantation; niobium compounds; optical microscopy; titanium compounds; vacuum deposited coatings; vacuum deposition; yttrium compounds; zirconium compounds; (TiZrAlYNb)N; AFM; X-ray diffraction; XRD; atomic-force microscopy; cathodic-vacuum-arc-vapor-deposition; coating phase analysis; electron microscopy; energy-dispersive analysis; hardness measurements; heavy negative charged gold ion; ion implantation; laser scanning microscopy; nitride high-entropy alloy properties; residual gas pressure; Artificial intelligence; Niobium; X-ray scattering; Zirconium;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959613
