DocumentCode
1564160
Title
Contributor listings
fYear
2008
Firstpage
1
Lastpage
2
Abstract
Contains an entry for each author and co-author included in this conference proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
Conference_Location
Cambridge, MA
ISSN
1078-8743
Print_ISBN
978-1-4244-1964-7
Type
conf
DOI
10.1109/ASMC.2008.4528991
Filename
4528991
Link To Document