DocumentCode
156425
Title
Patterns of microwave modification of semiconductor thin film structures
Author
Gordienko, E.Yu. ; Slipchenko, N.I. ; Poletaev, D.A. ; Prokaza, A.M. ; Pyataikina, M.I.
Author_Institution
Kharkov Nat. Univ. of Radioelectron., Kharkov, Ukraine
fYear
2014
fDate
7-13 Sept. 2014
Firstpage
763
Lastpage
764
Abstract
The present paper concerns heating, annealing and redoping of semiconductor layered structures using a microwave radiator with a micron-sized aperture. We proposed a variant of such a modifier that is based on a conical coaxial waveguide. The study is focused on localization of heat and specific spatiotemporal distribution of temperature depending on the electrical and thermal parameters of the objects under study.
Keywords
annealing; coaxial waveguides; doping; semiconductor thin films; temperature distribution; conical coaxial waveguide; micron-sized aperture; microwave modification patterns; microwave radiator; semiconductor layered structures annealing; semiconductor layered structures heating; semiconductor layered structures redoping; semiconductor thin film structures; temperature spatiotemporal distribution; Finite difference methods; Time-domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-966-335-412-5
Type
conf
DOI
10.1109/CRMICO.2014.6959620
Filename
6959620
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